Total reflection type of 193nm transmissive prism.


WoG Polarizer

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WoG polarizer is composed of Wollaston polarizer and GlanTaylor polarizer.And it is currently patent pending.

WoG polarizer has high transmission, high laser damage threshold, and high extinction ratio performance in DUV region.

WoG polarizer is high laser resistant. Because it uses a high laser damage threshold material with air space structure.

For incident light, one of the polarization is totally reflected and only the other polarization pass through WoG polarizer.

For this reason, it has high extinction ratio.

In the case of Rochon prism and Wollaston prism, unnecessary polarized light is transmitted through to the front.

On the other hand, WoG polarizer will reflect the unnecessary polarization. So you can compact your optical system.

There are two kinds of WoG polarizer types, 4Prism and 3prism. The 4prism type is longer than the 3prism type, and light can incident bidirectionally on the both side of it. The 3prism type of incident direction is only given one.

Clear aperture and holder structure can be changed on request.

Structure

4Pr Type

3Pr Type

Part No. WoG 193 4Pr WoG 193 3Pr
Wavelength (nm) 193.4 193.4
Transmittance (%) 88 (90 Typ.) 88 (90 Typ.)
Extinction ratio (dB) about 40 about 40
*Clear Aperture (mm) φ8 φ8
**Holder dimensions (mm) 18×18×28.5 18×18×21.5
Angle of incidence (°) ±2.5 ±2.5
surface Quality S/D = 10/5 S/D = 10/5
Transmitted Wave front PV(λ) 1/4 @ λ=633nm 1/4 @ λ=633nm
Coating Both sides
AR-coated
R≦0.5%
A≦1.0%
Both sides
AR-coated
R≦0.5%
A≦1.0%
Bidirectional
* Clear aperture can be changed on request
* * Holder structure can be changed depending on request

Schematic Diagrams of WoG Polarizers

4Pr Type

3Pr Type

Transmission characteristics of WoG Polarizers 4Pr Type

4Type-Transmittance-vs.Wavelength

4Type-Transmittance-vs.Angle-of-incidence

Transmission characteristics of WoG Polarizers 3Pr Type

3Type-Transmittance-vs.Wavelength

3Type-Transmittance-vs.Angle-of-incidence

Laser induced damage threshold

WoG polarizer is high laser resistant. Because it uses a high laser damage threshold material with air space structure.

Evaluation data of AR coating on the material of the WoG polarizer
*Laser induced damage
threshold (J/cm2)
17.1

* Irradiation conditions λ=193nm, 10ns pulse

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