DUV True Zero-order waveplate with AR-coating


MICRO THIN  Waveplate

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The MT Waveplate is made of one piece of birefringence crystal plate and very thin waveplate with zero-order or low-order.

In general, the thickness of true zero waveplate is very thin. In case of UV waveplate, especially its thickness is very thin around 10µm.

To solve the problem fo processing difficulty, the waveplate is normally manufactured with double-plate structure or attached to synthetic quartz glass plate.

However, the double-plate structure has higher retardation dependence of incident angle along with the increase of the total thickness.

On the other hand, glass plate-attached type has a concern about reliability of bonded part.

That's why we sell the MT waveplate which is the simplest structure with one crystal plate by thinning technology which utilized high accurate processing.

The waveplate thickness is around 10µm with AR coating on both sides and holder mounted for easy handling.

The remarkble features of MT waveplate are Less A.O.I. dependence of retardation, no optical contact, high trancemittance.

Although the standard specifications are for λ=193nm, 213nm, 266nm, we can product it for other wavelengths.

Specifications

Part No. MTH193 MTQ193
Surface Quality S/D = 30/10
Wavefront, PV (λ) ≦1/10 @ 633nm
Wavelength (nm) 193.4
Retardation (deg) 180 270
Retardation Error (deg) ≦±3 ≦±3
Coating Both sides
AR-coated
R≦0.5%
A≦1.0%
Both sides
AR-coated
R≦0.5%
A≦1.0%
Transmittance (%) ≧96 ≧96
Clear Aperture (mm) φ16 φ12 φ16 φ12
Holder Diameter(mm) φ30 φ25.4 φ30 φ25.4
HolderThickness(mm) 3 3 3 3

Part No. MTH213 MTQ213
Surface Quality S/D = 30/10
Wavefront, PV (λ) ≦1/10 @ 633nm
Wavelength (nm) 213
Retardation (deg) 180 270
Retardation Error (deg) ≦±3 ≦±3
Coating Both sides
AR-coated
R≦0.5%
Both sides
AR-coated
R≦0.5%
Transmittance (%) ≧97 ≧97
Clear Aperture (mm) *1) φ12 *1) φ12
Holder Diameter(mm) *1) φ25.4 *1) φ25.4
HolderThickness(mm) 3 3
*1) C.A.φ16, Holder Dia.φ30 are also available.

Part No. MTH266 MTQ266
Surface Quality S/D = 30/10
Wavefront, PV (λ) ≦1/10 @ 633nm
Wavelength (nm) 266
Retardation (deg) 180 270
Retardation Error (deg) ≦±2 ≦±2
Coating Both sides
AR-coated
R≦0.5%
Both sides
AR-coated
R≦0.5%
Transmittance (%) ≧97 ≧97
Clear Aperture (mm) *1) φ12 *1) φ12
Holder Diameter(mm) *1) φ25.4 *1) φ25.4
HolderThickness(mm) 3 3
*1) C.A.φ16, Holder Dia.φ30 are also available.

Holder

Dimension of MTH193 C.A.φ30

Comparison of Wavelength dependence

Comparison-of-Wavelength-dependence-HWP

Comparison-of-Wavelength-dependence-QWP

Comparison of A.O.I. dependence

Comparison of A.O.I. dependence

Explanation of direction of A.O.I.

Comparison of A.O.I. dependence : HWP

Comparison of A.O.I. dependence : QWP

Table 1 Temperature dependence of Retardation
HWP/QWP Type of Waveplate Temperature dependence (° /°C)
HWP MTH193 -0.093
0 order double plate : MgF2 -0.0054
High order single plate : MgF2 -0.12
QWP MTQ193 -0.139
0 order double plate : MgF2 -0.0027
High order single plate : MgF2 -0.12

AR Coating Reflectance Spectrum

Reflectance-of-AR-coating-for-λ=193.4nm

Transmittance Spectrum

Transmittance-of-MT-Waveplate

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